Etching in microsystem technology (Record no. 340481)

MARC details
000 -LEADER
fixed length control field 02488nmm a2200481 c 4500
001 - CONTROL NUMBER
control field 686403177
003 - CONTROL NUMBER IDENTIFIER
control field DE-601
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20210223115155.0
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr uuu---uuuuu
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 120216s1999 gw 000 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 3527295615
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783527295616
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 3527613781
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783527613786
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1002/9783527613786
Source of number or code doi
035 ## - SYSTEM CONTROL NUMBER
System control number ebr10302611
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)647791997
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)ocn212131961
035 ## - SYSTEM CONTROL NUMBER
System control number (DE-599)GBV686403177
040 ## - CATALOGING SOURCE
Original cataloging agency DE-601
Language of cataloging ger
Transcribing agency DE-601
Description conventions rakwb
041 0# - LANGUAGE CODE
Language code of text/sound track or separate title eng
050 #0 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7872.M3
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815/31
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Köhler, J. Michael
Dates associated with a name 1956-
9 (RLIN) 2379
240 10 - UNIFORM TITLE
Uniform title <a href="Ätzverfahren für die Mikrotechnik. <engl.>">Ätzverfahren für die Mikrotechnik. <engl.></a>
245 10 - TITLE STATEMENT
Title Etching in microsystem technology
Medium Elektronische Ressource
Statement of responsibility, etc. Michael Köhler; translated by Antje Wiegand
260 3# - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. Weinheim ;New York
Name of publisher, distributor, etc. Wiley-VCH
Date of publication, distribution, etc. c1999
300 ## - PHYSICAL DESCRIPTION
Extent Online-Ressource (xvi, 368 p)
Other physical details ill
500 ## - GENERAL NOTE
General note Includes bibliographical references ([345]-360) and index
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note Etching in Microsystem Technology; Preface; Contents; Table of Contents; Symbols; Abbreviations; 1 Introduction; 2 Distinctive Features of Microtechnical Etching; 3 Wet-Chemical Etching Methods; 4 Dry-Etching Methods; 5 Microforming by Etching of Locally Changed Material; 6 Chosen Recipes; References; Index..
520 ## - SUMMARY, ETC.
Summary, etc. Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching proc
533 ## - REPRODUCTION NOTE
Type of reproduction Online-Ausg.
Place of reproduction Palo Alto, Calif
Agency responsible for reproduction ebrary
Date of reproduction 2009
Note about reproduction Electronic reproduction; Available via World Wide Web
Fixed-length data elements of reproduction |2009||||||||||
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microlithography
9 (RLIN) 2380
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Plasma etching
9 (RLIN) 2381
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Masks (Electronics)
9 (RLIN) 2382
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element ebrary, Inc
9 (RLIN) 4
776 1# - ADDITIONAL PHYSICAL FORM ENTRY
International Standard Book Number 352761379X
776 1# - ADDITIONAL PHYSICAL FORM ENTRY
International Standard Book Number 9783527613793
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://onlinelibrary-wiley-com.libraryproxy.ist.ac.at/doi/book/10.1002/9783527613786">https://onlinelibrary-wiley-com.libraryproxy.ist.ac.at/doi/book/10.1002/9783527613786</a>
900 ## - EQUIVALENCE OR CROSS-REFERENCE-PERSONAL NAME [LOCAL, CANADA]
Numeration TUB Hamburg <830>
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Dewey Decimal Classification
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Date acquired Source of acquisition Cost, normal purchase price Total Checkouts Date last seen Cost, replacement price Price effective from Koha item type
  Not Lost Dewey Decimal Classification     e-Library e-Library 23/03/2016 9 300.00   23/03/2016 300.00 23/03/2016 eBook

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