MARC details
| 000 -LEADER |
|---|
| fixed length control field |
02488nmm a2200481 c 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
686403177 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
DE-601 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20210223115155.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
|---|
| fixed length control field |
cr uuu---uuuuu |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
120216s1999 gw 000 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
3527295615 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783527295616 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
3527613781 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783527613786 |
| 024 7# - OTHER STANDARD IDENTIFIER |
|---|
| Standard number or code |
10.1002/9783527613786 |
| Source of number or code |
doi |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
ebr10302611 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)647791997 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)ocn212131961 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(DE-599)GBV686403177 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DE-601 |
| Language of cataloging |
ger |
| Transcribing agency |
DE-601 |
| Description conventions |
rakwb |
| 041 0# - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 050 #0 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7872.M3 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3815/31 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Köhler, J. Michael |
| Dates associated with a name |
1956- |
| 9 (RLIN) |
2379 |
| 240 10 - UNIFORM TITLE |
|---|
| Uniform title |
<a href="Ätzverfahren für die Mikrotechnik. <engl.>">Ätzverfahren für die Mikrotechnik. <engl.></a> |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Etching in microsystem technology |
| Medium |
Elektronische Ressource |
| Statement of responsibility, etc. |
Michael Köhler; translated by Antje Wiegand |
| 260 3# - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc. |
Weinheim ;New York |
| Name of publisher, distributor, etc. |
Wiley-VCH |
| Date of publication, distribution, etc. |
c1999 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
Online-Ressource (xvi, 368 p) |
| Other physical details |
ill |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes bibliographical references ([345]-360) and index |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Etching in Microsystem Technology; Preface; Contents; Table of Contents; Symbols; Abbreviations; 1 Introduction; 2 Distinctive Features of Microtechnical Etching; 3 Wet-Chemical Etching Methods; 4 Dry-Etching Methods; 5 Microforming by Etching of Locally Changed Material; 6 Chosen Recipes; References; Index.. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching proc |
| 533 ## - REPRODUCTION NOTE |
|---|
| Type of reproduction |
Online-Ausg. |
| Place of reproduction |
Palo Alto, Calif |
| Agency responsible for reproduction |
ebrary |
| Date of reproduction |
2009 |
| Note about reproduction |
Electronic reproduction; Available via World Wide Web |
| Fixed-length data elements of reproduction |
|2009|||||||||| |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microlithography |
| 9 (RLIN) |
2380 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Plasma etching |
| 9 (RLIN) |
2381 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Masks (Electronics) |
| 9 (RLIN) |
2382 |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
ebrary, Inc |
| 9 (RLIN) |
4 |
| 776 1# - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| International Standard Book Number |
352761379X |
| 776 1# - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| International Standard Book Number |
9783527613793 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="https://onlinelibrary-wiley-com.libraryproxy.ist.ac.at/doi/book/10.1002/9783527613786">https://onlinelibrary-wiley-com.libraryproxy.ist.ac.at/doi/book/10.1002/9783527613786</a> |
| 900 ## - EQUIVALENCE OR CROSS-REFERENCE-PERSONAL NAME [LOCAL, CANADA] |
|---|
| Numeration |
TUB Hamburg <830> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |