Normal view MARC view

Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

  • control field: 2382

003 - CONTROL NUMBER IDENTIFIER

  • control field: AT-ISTA

005 - DATE AND TIME OF LATEST TRANSACTION

  • control field: 20160322142335.0

008 - FIXED-LENGTH DATA ELEMENTS

  • fixed length control field: 160322|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

  • Original cataloging agency: AT-ISTA
  • Transcribing agency: AT-ISTA

150 ## - HEADING--TOPICAL TERM

  • Topical term or geographic name entry element: Masks (Electronics)

670 ## - SOURCE DATA FOUND

  • Source citation: Work cat.: (AT-ISTA): K√∂hler, J. Michael 1956- 2379, Etching in microsystem technology, c1999

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