Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 2382

003 - CONTROL NUMBER IDENTIFIER

• control field: AT-ISTA

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20160322142335.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 160322|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: AT-ISTA
• Transcribing agency: AT-ISTA

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Masks (Electronics)

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (AT-ISTA): Köhler, J. Michael 1956- 2379, Etching in microsystem technology, c1999