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Etching in microsystem technology Elektronische Ressource Michael Köhler; translated by Antje Wiegand

by Köhler, J. Michael, 1956- | ebrary, Inc.

Material type: Computer file Computer file; Format: electronic available online remote Language: English Publication details: Weinheim ;New York Wiley-VCH c1999Online access: Click here to access online Availability: Items available for loan: e-Library (1).
Lithography : principles, processes and materials / Theodore C. Hennessy, editor.

by Hennessy, Theodore C.

Series: Engineering tools, techniques and tables | Nanotechnology science and technology seriesMaterial type: Text Text; Format: available online remote; Literary form: Not fiction Publisher: New York : Nova Science, c2011Online access: Click here to access online Availability: Items available for loan: e-Library (1).
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