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Etching in microsystem technology Elektronische Ressource Michael Köhler; translated by Antje Wiegand

by Köhler, J. Michael, 1956- | ebrary, Inc.

Material type: Computer file Computer file; Format: electronic available online remote Language: English Publication details: Weinheim ;New York Wiley-VCH c1999Online access: Click here to access online Availability: Items available for loan: e-Library (1).
Plasma processing and processing science / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

by Chen, Francis F, 1929- | National Research Council (U.S.). Panel on Plasma Processing | National Research Council (U.S.). Naval Studies Board | National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications.

Series: NRL strategic seriesMaterial type: Text Text; Format: available online remote; Literary form: Not fiction Publication details: Washington, D.C. : National Academy Press, 1995Online access: Click here to access online Availability: Items available for loan: e-Library (1).
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